Last modified: 2002/02/15

Products
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Non-Contact Surface Profiler
SP-500

 TORAY SP-500 The SP-500 is the world's fastest 3-D areal surface profiler based on vertical scanning white-light interferometry.

Its application fields include semi-conductors, data storage, LCD/PDP, plastic films, optics and precise mechanical parts.

A paper on the SP-500 development won the 2001 SICE(Society of Instrument and Control Engineers) Technology Award.

bullet19_gray.gif Features

  • Superior repeatability and accuracy with non-contact and non-destructive
  • Revolutionarily fast scan speed of maximum 100um/sec achieved by a new signal processing algorithm
  • Full three-dimensional areal surface measurement
  • Wide measurement range of 0-100um
  • Objective selectable for optimum Field-Of-View
  • Easy operation with Windows NT in Japanese/English
  • Flexible to an automated system

bullet19_gray.gif Specifications

Model SP-500
(Standard)		 SP-500HR
(High Res)		 SP-500DS
(Double Speed)
Measurement Technique Narrow-band White-light Interferometry (Vertical Scanning Interferometry), and Phase-Shift Interferometry
Algorithm SB Algorithm; jointly invented by Tokyo Institute of Technology and Toray Engineering Co., Ltd.; Patent-Pending
Range of Measurement 0 - 100 um (Optional: 0 - 350 um)
Vertical Scan Speed Selectable; Max. 50 um/sec Selectable; Max. 100 um/sec
Objectives Selectable; 2.5X, 5X, 10X, 20X, 50X
Measurement Speed Dependent on the various parameters;
[Example] In case of 25 um range & 128*120 pixel array,
Total : 0.8 sec Total : 0.6 sec
Repeatability Dependent on the various parameters;
[Example] Sigma(Average)= 20 nm with Vertical Scanning Interferometry; 0.1nm with Phase-Shift Interferometry
Measurement Array Selectable; 512x480, 256x240, 128x120
(max. 1376x1040 in HR model)
Computer System/OS PC/Windows NT
Options Image Zoom Lens (0.35X, 0.45X, 0.6X, 2X, 4X)
Continuous Zoom Lens
Vibration Isolation Table
Phase-Shift Measurement Software
Bump Measurement Software
Magnetic Head Measurement Software
Stitching Software
Automatic X-Y Stage
Utilities AC 90-110V; 50/60 Hz; 1 KVA

Subject to change without notice.

 bullet19_gray.gif Objective Lens and FOV (without image zoom lens)

　

Standard Camera

High-Res Camera (HR model)

Objevtive　

FOV (mm)

Pixel Size (um)

FOV (mm)

Pixel Size (um)

2.5X

1.6X1.4

3.2

3.5X2.7

2.6

５Ｘ

0.80X0.72

1.6

1.8X1.3

1.3

10X

0.40X0.36

0.8

0.88X0.67

0.67

20X

0.20X0.18

0.4

0.44X0.33

0.33

50X

0.08X0.07

0.16

0.18X0.13

0.13

Dependent on the image zoom lens

bullet19_gray.gif  Test Results

Step Height

IC Bump

IC Bump (3D Display)

IC Bump (Limited Area; 3D Display)

 



 bullet19_gray.gif For more information:  pcb21@korea.com

 

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