Toray OP-50L Film Thickness Measurement System is a unique metrology tool capable of measuring thickness, index, and extinction coefficient of a variety of thin films with excellent accuracy, precision, and long term repeatability. The measurement method which is fast, simple, non-contact, and non-destructive is based on patented optical measurement technology with a sub-micron spot size and minimal side effect. Up to 3 parameters can be measured simultaneously for structures consisting of up to 3 layers of films on substrate. Users can monitor the goodness of the algorithm's fitting operations in both quantitative and graphical manners.

• Non-contact and Non-destructive Measurement
• BPR --- Advanced Measurement Technique
• Multi-parameter, Multi-layer Measurement
  Up to 3 parameters (thickness(t), index(n), and extinction coefficient(k)) can be measured simultaneously for structures consisting of up to 3 layers of films.
• Small Spot Size: 0.9 micron spot size can realize fine pattern construction measurement.
• Wide range of measurement for 100 angstrom to 20 micron.
• Superior Repeatability and Accuracy